Place of Origin
United States
Brand Name
901P MicroPirani and Piezo Loadlock Vacuum Pressu
Absolute Measurement Range
1.0 x 10-5 to 1500 Torr
Differential Measurement Range
-760 to +760 Torr
Digital Communication
RS485/RS232 (4800 to 230400 Baud)
Sensor
MicroPirani (MEMS Thermal Conductivity)
Relays
3 relays SPDT (optional)
Set Point Range
Absolute: 5.0 x 10-4 to 1000 Torr:Differential: -760 to +100 Torr
Calibration Gas
Air, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, xenon, Neon
Operating Temperature
0-40
Maximum Bakeout Temperature
85° non-operating
Digital Controls
Zero adjust, span adjust, direction, enable, switch, LED test
