Mass flow accuracy (Liquid)
±0.10% of rate (standard)±0.05% of rate
Mass flow repeatability (Liquid)
±0.05% of rate (standard)±0.025% of rate
Volume flow accuracy (Liquid)
±0.10% of rate (standard)±0.05% of rate
Volume flow repeatability (Liquid)
±0.05% of rate (standard)±0.025% of rate
Mass flow accuracy (Gas)
±0.35% of rate
Mass flow repeatability (Gas)
±0.20% of rate
Temperature accuracy
±1 °C ±0.5% of reading
Sensor maximum working pressure
1,500 psig (103 barg)